Friction stir welding in semiconductor manufacturing applications
AssigneeLam Research Corporation
InventorsNick Ray Linebarger, Jr., Prahalad Narasinghdas Agarwal, Ravikumar Sadashiv Patil, Damodar Rajararn Shanbhag
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Abstract
In an example, a showerhead pedestal assembly for a substrate processing chamber is provided. The showerhead pedestal assembly includes a faceplate. A platen is disposed within the faceplate and includes a heater element extending through at least one groove in the faceplate. The at least one groove is profiled to accept at least one portion of the heater element. A periphery of the platen is joined to an interior surface of the faceplate by a friction stir welded joint.
Claims40
A showerhead pedestal assembly for a substrate processing chamber, the showerhead pedestal assembly including:
- a faceplate;
- a platen disposed within the faceplate, the platen including a heater element extending through at least one groove in the faceplate, the at least one groove profiled to accept at least one portion of the heater element extending therethrough;
- and
- a power supply for the heater element;
- wherein a periphery of the platen is joined to an interior surface of the faceplate by a friction stir welded joint.
The showerhead pedestal assembly of claim I, further comprising a plurality of heat transfer posts extending between opposed surfaces of the faceplate and the platen, the plurality of heat transfer posts including a friction stir welded material.
The showerhead. pedestal assembly of claim I, further comprising a filler cap including at least one baffle sized and configured to reside in the at least one groove in the faceplate.
A method of forming a showerhead pedestal assembly for a substrate processing chamber, the method comprising:
- providing a faceplate;
- providing a platen disposed within the faceplate, the platen including a heater element extending through at least one groove in the faceplate, the at least one groove profiled to accept at least one portion of the heater element extending therethrough;
- and
- providing a power supply for the heater element;
- wherein a periphery of the platen is joined to an interior surface of the faceplate by friction stir welding.
Dependencies are inferred from the claim text.