Mounting table and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsKatsuyoshi AIKAWA, Hiroshi SONE, Shinji ORIMOTO
Life of this patent
Estimating the term…
Abstract
There is provided a mounting table. The mounting table comprises: a dielectric plate having a through-hole at an outer peripheral portion thereof and having a substrate support on which a substrate is placed; a support member; a first heat insulating member disposed between the dielectric plate and the support member; a first biasing member disposed between the first heat insulating member and the support member, and a fastening member configured to detachably fix the dielectric plate to the support member by way of penetrating through the through-hole of the dielectric plate, the first heat insulating member, and the first biasing member.
Claims9
A mounting table comprising:
- a dielectric plate having a through-hole at an outer peripheral portion thereof and having a substrate support on which a substrate is placed;
- a support member;
- a first heat insulating member disposed between the dielectric plate and the support member;
- a first biasing member disposed between the first heat insulating member and the support member, and
- a fastening member configured to detachably fix the dielectric plate to the support member by way of penetrating through the through-hole of the dielectric plate, the first heat insulating member, and the first biasing member.
A substrate processing apparatus comprising:
- a mounting table comprising:
- a dielectric plate having a through-hole at an outer peripheral portion thereof and having a substrate support on which a substrate is placed.
- a support member,
- a first heat insulating member disposed between the dielectric plate and the support member,
- a first biasing member disposed between the first heat insulating member and the support member, and
- a fastening member configured to detachably fix the dielectric plate to the support member by way of penetrating through the through-hole of the dielectric plate, the first heat insulating member, and the first biasing member;
- and
- a chamber accommodating the mounting table.
Dependencies are inferred from the claim text.