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US 2022/0189795 A1Published application
Apparatus for treating substrate and temperature control method
AssigneeSemes Co., Ltd.
InventorsSANG MIN LEE, YOUNG HUN LEE, MYUNG SEOK CHA
Life of this patent
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Abstract
The inventive concept provides a temperature controlling method. The temperature controlling method for controlling a temperature of a tank storing a treating fluid transferred to the chamber, comprises supplying the treating fluid to the inner space of the tank, heating the treating fluid at the inner space, and transferring the heated treating fluid to the chamber, wherein the temperature of the inner space is controlled based on a measured pressure of the inner space.
Claims14
-7. (canceled)
A substrate treating apparatus comprising:
- a chamber having a treating space for treating a substrate;
- a fluid supply unit configured to supply a treating fluid to the treating space;
- and
- a controller,
- wherein the fluid supply unit comprises:
- a tank having an inner space;
- a first supply line supplying the treating fluid to the inner space;
- a second supply line transferring the treating fluid from the inner space to the treating space;
- a temperature controlling member configured to control a temperature of the inner space;
- and
- a pressure measuring member configured to measure a pressure of the inner space,
- wherein the controller controls the temperature controlling member to control the temperature of the inner space, based on a measured pressure of the inner space measured by the pressure measuring member.
9 more elements
A substrate treating apparatus comprising:
- a chamber having a treating space for treating a substrate using a treating fluid in a supercritical state;
- a fluid supply unit configured to supply a treating fluid to the treating space;
- and
- a controller controlling the fluid supply unit,
- wherein the fluid supply unit comprises:
- a tank having an inner space;
- a first supply line supplying the treating fluid to the inner space;
- a second supply line transferring the treating fluid from the inner space to the treating space;
- a heater transferring a heat to an atmosphere of the inner space;
- and
- a pressure measuring member measuring a pressure of the inner space,
- wherein the controller controls the heater to transfer the heat to the atmosphere of the inner space so that the pressure of the inner space measured by the pressure measuring member reaches a predetermined pressure.
9 more elements
Dependencies are inferred from the claim text.