Gas delivery system for a shared gas delivery architecture

A semiconductor processing system, comprising:

• a gas splitter defining a plurality of gas inlets and a plurality of gas outlets, wherein a number of the plurality of gas outlets is greater than a number of the plurality of gas inlets;
• a plurality of valve blocks that are each interfaced with the gas splitter, wherein:
• each of the plurality of valve blocks defines a number of gas lumens;
• an inlet of each of the gas lumens is in fluid communication with one of the plurality of gas outlets;
• and
• an interface between the gas splitter and each of the plurality of valve blocks comprises a choke having a diameter that is less than a diameter of each of the plurality of gas outlets and of each of the inlets of the gas lumens;
• and
• a plurality of output weldments, each output weldment fluidly coupling an outlet of one of the gas lumens with one of a plurality of output manifolds.

A semiconductor processing system, comprising:

• a plurality of processing chambers, each processing chamber defining a processing region;
• a lid plate positioned above the plurality of processing chambers;
• a plurality of output manifolds seated on the lid plate, each of the plurality of output manifolds being in fluid communication with the processing region of one of the plurality of processing chambers;
• a gas splitter seated on the lid plate, the gas splitter defining a plurality of gas inlets and a plurality of gas outlets;
• a plurality of valve blocks that are each interfaced with the gas splitter, wherein:
• each of the plurality of valve blocks defines a number of gas lumens;
• an inlet of each of the gas lumens is in fluid communication with one of the plurality of gas outlets;
• and
• an interface between the gas splitter and each of the plurality of valve blocks comprises a choke having a diameter that is less than a diameter of each of the plurality of gas outlets and of each of the inlets of the gas lumens;
• and
• a plurality of weldments, each weldment fluidly coupling an outlet of one of the gas lumens with a respective one of the output manifolds.