Method of forming structures for threshold voltage control
AssigneeASM IP Holding B.V.
InventorsMaart van Druenen, Charles Dezelah, Qi Xie, Petro Deminskyi, Giuseppe Alessio Verni, Ren-Jie Chang, Lifu Chen
Life of this patent
Estimating the term…
Abstract
Methods and systems for depositing rare earth metal carbide containing layers on a surface of a substrate and structures and devices formed using the methods are disclosed. An exemplary method includes using a cyclical deposition process such as an atomic layer deposition process for depositing a rare earth metal carbide containing layer onto a surface of the substrate.
Claims20
A method for depositing a rare earth metal carbide containing layer on a substrate, the method comprising the steps of:
- providing a substrate within a reaction chamber, the substrate comprising a surface layer;
- depositing a rare earth metal carbide containing layer onto the surface layer by means of a cyclical deposition process, the cyclical deposition process comprising one or more cycles, a cycle comprising:
- providing a rare earth metal precursor to the reaction chamber in a precursor pulse;
- and
- providing a carbon reactant to the reaction chamber in a reactant pulse;
- thus forming a rare earth metal carbide containing layer on the substrate.
A method for forming an electrode on a substrate, the method comprising the steps of:
- providing a substrate within a reaction chamber the substrate comprising a gate dielectric;
- depositing a first conductive layer on the gate dielectric;
- depositing a rare earth metal carbide containing layer onto the first conductive layer by means of a cyclical deposition process, the cyclical deposition process comprising one or more cycles, a cycle comprising:
- providing a rare earth metal precursor to the reaction chamber in a precursor pulse;
- and
- providing a carbon reactant to the reaction chamber in a reactant pulse;
- and,
- depositing a second conductive layer on the rare earth metal carbide layer;
- thus forming an electrode on the substrate, the electrode comprising the first conductive layer, the rare earth metal carbide containing layer, and the second conductive layer.
Dependencies are inferred from the claim text.