Bottom and middle edge rings
AssigneeLam Research Corporation
InventorsHiran Rajitha RATHNASINGHE, Shawn TOKAIRIN, Jon MCCHESNEY
Life of this patent
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Abstract
A bottom ring is configured to support a moveable edge ring that is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a plurality of vertical guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring, each of the guide channels including a first region having a smaller diameter than the guide channel and being configured to receive respective lift pins for raising and lowering the edge ring, and a guide feature extending upward from the upper surface of the bottom ring.
Claims20
A bottom ring configured to support a moveable edge ring, wherein the edge ring is configured to be raised and lowered relative to a substrate support, the bottom ring comprising:
- an upper surface, wherein the upper surface is stepped;
- an annular inner diameter;
- an annular outer diameter;
- a lower surface;
- a plurality of vertical guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring, wherein each of the guide channels includes a first region having a smaller diameter than the guide channel, and wherein the guide channels are configured to receive respective lift pins for raising and lowering the edge ring;
- and
- a guide feature extending upward from the upper surface of the bottom ring.
Dependencies are inferred from the claim text.