Bottom and middle edge rings
AssigneeLam Research Corporation
InventorsHiran Rajitha RATHNASINGHE, Shawn TOKAIRIN, Jon MCCHESNEY
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Abstract
A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring and further configured to be raised and lowered relative to a substrate support includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a guide feature in the upper surface defining the annular outer diameter, an inner annular rim in the upper surface defining the annular inner diameter, and a groove defined in the upper surface between the guide feature and the inner annular rim.
Claims10
A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring, wherein the edge ring is configured to be raised and lowered relative to a substrate support, the middle ring comprising:
- an upper surface, wherein the upper surface is stepped;
- an annular inner diameter;
- an annular outer diameter;
- a lower surface;
- a guide feature in the upper surface defining the annular outer diameter;
- an inner annular rim in the upper surface defining the annular inner diameter;
- and
- a groove defined in the upper surface between the guide feature and the inner annular rim.
Dependencies are inferred from the claim text.