Retuning for impedance matching network control

A matching network system, comprising:

• an input sensor;
• a controller coupled to the input sensor;
• a first motor coupled to the controller and to a variable load capacitor;
• a second motor coupled to the controller and a variable tuning capacitor;
• wherein the input sensor is used to determine a current value, a voltage value, and a phase value between the current value and the voltage value of the input signal;
• and
• wherein the controller is configured to:
• determine a phase error value and a magnitude error value;
• perform tuning of the matching network, the tuning comprising:
• obtaining a first tuning algorithm wherein:
• a first adjustment for a position of a first variable capacitor is determined based on the magnitude error value;
• and
• a second adjustment for a position of a second variable capacitor is determined based on the phase error value;
• obtaining a second tuning algorithm wherein:
• a third adjustment for the position of the first variable capacitor is determined based on a first composite value of the magnitude error value and the phase error value;
• and
• a fourth adjustment for the position of the second variable capacitor is determined based on a second composite value of the magnitude error value and the phase error value;
• using a blended mode tuning that provides a scaling factor influence to reduce an influence of composite error signals as the matching network converges on a tuning point, the blended mode tuning to apply one or more adjustments by:
• applying a first weighting factor to the first adjustment and a second weighting factor to the third adjustment to create a blended first adjustment;
• applying a third weighting factor to the second adjustment and a fourth weighting factor to the fourth adjustment to create a blended second adjustment;
• adjusting the first variable capacitor based on the blended first adjustment;
• and
• adjusting the second variable capacitor based on the blended second adjustment;
• determining whether a dead-zone has occurred;
• and
• if a dead-zone has occurred, then changing at least the first weighting factor and the second weighting factor or the third weighting factor and the fourth weighting factor prior to repeating the using the blended mode tuning to apply one or more adjustments.

A radio frequency plasma processing device comprising:

• a reaction chamber;
• a radio frequency generator to supply radio frequency power to a plasma in the reaction chamber;
• and
• a matching network system comprising:
• an input sensor;
• a controller coupled to the input sensor;
• a first motor coupled to the controller, the first motor coupled to a variable load capacitor;
• a second motor coupled to the controller, the second motor coupled to a variable tuning capacitor;
• wherein the input sensor is configured to determine a current value, a voltage value, and a phase value between the current value and the voltage value of the input signal;
• and
• wherein the controller is configured to:
• determine a phase error value and a magnitude error value;
• perform tuning of the matching network, the tuning comprising:
• obtaining a first tuning algorithm wherein:
• a first adjustment for a position of a first variable capacitor is determined based on the magnitude error value;
• and
• a second adjustment for a position of a second variable capacitor is determined based on the phase error value;
• obtaining a second tuning algorithm wherein:
• a third adjustment for the position of the first variable capacitor is determined based on a first composite value of the magnitude error value and the phase error value;
• and
• a fourth adjustment for the position of the second variable capacitor is determined based on a second composite value of the magnitude error value and the phase error value;
• using a blended mode tuning that provides a scaling factor influence to reduce an influence of composite error signals as the matching network converges on a tuning point, the blended mode tuning to apply one or more adjustments by::
• applying a first weighting factor to the first adjustment and a second weighting factor to the third adjustment to create a blended first adjustment;
• applying a third weighting factor to the second adjustment and a fourth weighting factor to the fourth adjustment to create a blended second adjustment;
• adjusting the first variable capacitor based on the blended first adjustment;
• and
• adjusting the second variable capacitor based on the blended second adjustment;
• determining whether a dead-zone has occurred;
• and
• if a dead-zone has occurred, then changing at least the first weighting factor and the second weighting factor or the third weighting factor and the fourth weighting factor prior to repeating the using the blended mode tuning to apply one or more adjustments.