US 2022/0189738 A1 · Method and System for Automated Frequency Tuning of Radiofrequency (RF) Signal Generator for Multi-Level RF Power Pulsing

Abstract

A two-dimensional frequency search grid is defined by a first coordinate axis representing an operating frequency setpoint of an RF signal generator in a first operational state and a second coordinate axis representing an operating frequency setpoint of the RF signal generator in a second operational state. The RF signal generator has a first output power level in the first operational state and a second output power level in the second operational state. The RF signal generator operates in an multi-level RF power pulsing mode by cyclically alternating between the first operational state and the second operational state. An automated search process is performed within the two-dimensional frequency search grid to simultaneously determine an optimum value for the operating frequency setpoint of the RF signal generator in the first operational state and an optimum value for the operating frequency setpoint of the RF signal generator in the second operational state.

Claims21

Dependent claims

A method for automated frequency tuning of a radiofrequency (RF) signal generator for operating in a multi-level RF power pulsing mode, comprising:

defining a two-dimensional frequency search grid having a first coordinate axis representing an operating frequency setpoint of the RF signal generator in a first operational state and having a second coordinate axis representing an operating frequency setpoint of the RF signal generator in a second operational state, the RF signal generator having a first output power level in the first operational state and a second output power level in the second operational state, the first and second output power levels being different from each other, the RF signal generator programmed to operate in the multi-level RF power pulsing mode by cyclically alternating between the first operational state and the second operational state;
performing an automated search process within the two-dimensional frequency search grid to simultaneously determine a first optimum value for the operating frequency setpoint of the RF signal generator in the first operational state and a second optimum value for the operating frequency setpoint of the RF signal generator in the second operational state;
and
setting the RF signal generator to operate using the first optimum value and the second optimum value.

1 more element

A system for automated frequency tuning of a radiofrequency (RF) signal generator for operating in a multi-level RF power pulsing mode, comprising:

a plasma processing chamber including a substrate support structure and an electrode;
an RF signal generator configured to generate RF signals and transmit the RF signals through an output of the RF signal generator, the RF signal generator set to have a first output power level in a first operational state and a second output power level in a second operational state, the first and second output power levels being different from each other, the RF signal generator programmed to operate in the multi-level RF power pulsing mode by cyclically alternating between the first operational state and the second operational state;
an impedance matching system having an input connected to the output of the RF signal generator, the impedance matching system having an output connected to the electrode, the impedance matching system configured to control an impedance at the output of the RF signal generator to enable transmission of the RF signals through the electrode to a plasma generated within the plasma processing chamber;
and
a control system programmed to define a two-dimensional frequency search grid having a first coordinate axis representing an operating frequency setpoint of the RF signal generator in the first operational state and having a second coordinate axis representing an operating frequency setpoint of the RF signal generator in the second operational state, the control system programmed to perform an automated search process within the two-dimensional frequency search grid to simultaneously determine a first optimum value for the operating frequency setpoint of the RF signal generator in the first operational state and a second optimum value for the operating frequency setpoint of the RF signal generator in the second operational state.

2 more elements

Dependencies are inferred from the claim text.

Method and System for Automated Frequency Tuning of Radiofrequency (RF) Signal Generator for Multi-Level RF Power Pulsing

Life of this patent

Method and System for Automated Frequency Tuning of Radiofrequency (RF) Signal Generator for Multi-Level RF Power Pulsing

Life of this patent

Abstract

Claims21