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US 2022/0189732 A1Published application
Scanning electron microscope having detachable column, and image acquisition method using the same
AssigneeCoxem Co., Ltd
InventorJun Hee LEE
Life of this patent
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Abstract
A scanning electron microscope according to the present invention enables a column to be detached from a sample installation unit, thereby addressing issues related to the column, such as simple calibration related to the column, tilt of a beam, replacement of consumables, etc., by replacing the entire column. As such, the scanning electron microscope has the advantage of being simply and easily repaired and maintained.
Claims12
A scanning electron microscope, comprising:
- a column (10) in which an electron gun (11), a condenser lens (12), an objective lens (13) and a first vacuum pump (P) are installed therein, the column (10) having a vacuum space (S1) inside, and a membrane (19) being installed at a lower end of the column (10);
- a sample installation unit (30) connected to the column (10), having a space in which a sample is installed, and coupled to a frame (50);
- and
- an attaching/detaching means to detachably couple the column (10) to the sample installation unit (30) to bring the column (10) and the sample installation unit (30) together,
- wherein the frame (50), the sample installation unit (30) and the column (10) are integrated by the attaching/detaching means,
- air is disallowed to pass through the membrane (19) while an electron generated by the electron gun (11) is allowed to pass through the membrane (19) to scan the sample, and
- a connector (15) is provided on one side of the column (10), and the connector (15) transmits power necessary to operate the electron gun (11), the condenser lens (12), the objective lens (13) and the first vacuum pump (P), a control signal of the condenser lens (12) and the objective lens (13), and a signal of a detector (16).
4 more elements
An image acquisition method using a scanning electron microscope, comprising:
- (a) making a vacuum inside a column 10 in a state in which the column 10 and a sample installation unit 30 are separated;
- (b) after the step (a), coupling the column (10) to the sample installation unit (30);
- (c) after the step (b), making a vacuum or atmospheric pressure state in the sample installation unit (30);
- and
- (d) acquiring an image of a sample,
- wherein a first vacuum pump (P) is provided in the column (10), a membrane (19) is installed at a lower end of the column (10), and air is not allowed to pass through the membrane (19) while an electron generated by an electron gun (11) is allowed to pass through the membrane (19) to scan the sample,
- a frame (50), the sample installation unit (30) and the column (10) are integrated by the coupling in the step (b), and
- a connector (15) is provided on one side of the column (10), and the connector (15) transmits power necessary to operate the electron gun (11), a condenser lens (12), an objective lens (13) and the first vacuum pump (P), a control signal of the condenser lens (12) and the objective lens (13) and a signal of a detector (16).
5 more elements
Dependencies are inferred from the claim text.