Aberration corrector

An aberration corrector comprising:

• a first electrode substrate provided with a plurality of first passage holes through which multiple electron beams pass, a shield electrode being disposed on inner walls of the plurality of first passage holes;
• a second electrode substrate disposed below the first electrode substrate and provided with a plurality of second passage holes through which the multiple electron beams pass, a shield electrode being disposed on inner walls of the plurality of second passage holes, a plurality of first electrodes of four or more poles being disposed individually on each top surface region of top surface regions around some second passage holes among the plurality of second passage holes;
• and
• a third electrode substrate disposed below the second electrode substrate and provided with a plurality of third passage holes through which the multiple electron beams pass, a plurality of second electrodes of four or more poles being disposed individually on each of top surface region of top surface regions around some third passage holes corresponding to remaining second passage holes in which the plurality of first electrodes are not disposed, among the plurality of third passage holes, wherein
• the some second passage holes in which the plurality of first electrodes are disposed are formed to have a first hole diameter, and some first passage holes located above the some second passage holes among the plurality of first passage holes of the first electrode substrate are formed to have a second hole diameter from a top surface of the first electrode substrate to a middle toward a back surface of the first electrode substrate and to have a third hole diameter larger than the first and second hole diameters from the middle to the back surface of the first electrode substrate, and
• the some third passage holes in which the plurality of second electrodes are disposed are formed to have the first hole diameter, and remaining second passage holes located above the some third passage holes among the plurality of second passage holes of the second electrode substrate are formed to have the second hole diameter from a top surface of the second electrode substrate to a middle toward a back surface of the second electrode substrate and to have the third hole diameter larger than the first and second hole diameters from the middle to the back surface of the second electrode substrate.