Multi-level ferroelectric field-effect transistor devices

A device, comprising:

• a non-volatile memory comprising an array of non-volatile memory cells, wherein at least one non-volatile memory cell comprises a ferroelectric field-effect transistor (FeFET) device, wherein the FeFET device comprises:
• a first source/drain region and a second source/drain region disposed in an upper surface of a substrate;
• and
• a gate structure which comprises a ferroelectric layer disposed over the substrate, and a gate electrode disposed over the ferroelectric layer;
• wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region;
• and
• a control system, operatively coupled to the non-volatile memory, to program the FeFET device of the at least one non-volatile memory cell to have a logic state among a plurality of different logic states;
• wherein at least one logic state among the plurality of different logic states corresponds to a polarization state of the FeFET device in which the first and second regions of the ferroelectric layer have respective remnant polarizations with opposite polarities;
• wherein the ferroelectric layer comprises a polycrystalline microstructure comprising a plurality of grains having an average grain size;
• and
• wherein a gate length of the gate structure is at least two times the average grain size of the ferroelectric layer.

A device, comprising:

• a non-volatile memory comprising an array of non-volatile memory cells, wherein at least one non-volatile memory cell comprises a ferroelectric field-effect transistor (FeFET) device, wherein the FeFET device comprises:
• a first source/drain region and a second source/drain region disposed in an upper surface of a substrate;
• and
• a gate structure which comprises a ferroelectric layer disposed over the substrate, and a gate electrode disposed over the ferroelectric layer;
• wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region;
• and
• a control system, operatively coupled to the non-volatile memory, to program the FeFET device of the at least one non-volatile memory cell to have a logic state among a plurality of different logic states;
• wherein at least one logic state among the plurality of different logic states corresponds to a polarization state of the FeFET device in which the first and second regions of the ferroelectric layer have respective remnant polarizations with opposite polarities;
• wherein the first region of the ferroelectric layer comprises a first ferroelectric domain;
• wherein the second region of the ferroelectric layer comprises a second ferroelectric domain;
• and
• wherein the first and second ferroelectric domains have a same or a substantially similar coercive field characteristic.

A device, comprising:

• a non-volatile memory comprising an array of non-volatile memory cells, wherein at least one non-volatile memory cell comprises a ferroelectric field-effect transistor (FeFET) device, wherein the FeFET device comprises:
• a first source/drain region and a second source/drain region disposed in an upper surface of a substrate;
• and
• a gate structure which comprises a ferroelectric layer disposed over the substrate, and a gate electrode disposed over the ferroelectric layer;
• wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region;
• and
• a control system, operatively coupled to the non-volatile memory, to program the FeFET device of the at least one non-volatile memory cell to have a logic state among a plurality of different logic states;
• wherein at least one logic state among the plurality of different logic states corresponds to a polarization state of the FeFET device in which the first and second regions of the ferroelectric layer have respective remnant polarizations with opposite polarities;
• wherein the non-volatile memory further comprises:
• control lines connected to the least one non-volatile memory cell, wherein the control lines comprise a word line connected to the gate electrode of the FeFET device, a source line connected to the first source/drain region of the FeFET device, and a bit line connected to the second source/drain region of the FeFET device;
• wherein the control system is operatively coupled to the control lines;
• wherein the control system generates programming control voltages on the control lines to program the FeFET device of the least one non-volatile memory cell to store a logic state among the plurality of different logic states represented by at least two bits;
• and
• wherein the plurality of different logic states comprises:
• a first logic state which corresponds to a first polarization state of the FeFET device in which the first and second regions each comprise a remnant polarization with a first polarity;
• a second logic state which corresponds to a second polarization state of the FeFET device in which the first and second regions each comprise a remnant polarization with a second polarity which is opposite of the first polarity;
• a third logic state which corresponds to a third polarization state of the FeFET device in which the first region comprises a remnant polarization with the first polarity, and the second region comprises a remnant polarization with the second polarity;
• and
• a fourth logic state which corresponds to a fourth polarization state of the FeFET device in which the first region comprises a remnant polarization with the second polarity, and the second region comprises a remnant polarization with the first polarity.

A method, comprising:

• programming a ferroelectric field-effect transistor (FeFET) device to store a given logic state among a plurality of different logic states, wherein the FeFET device comprises first and second source/drain regions, and a gate structure which comprises a ferroelectric layer and a gate electrode disposed over the ferroelectric layer, wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region;
• wherein programming the FeFET device to store the given logic state comprises programming the FeFET device to have a polarization state in which the first and second regions of the ferroelectric layer have respective remnant polarizations with opposite polarities;
• and
• wherein programming the FeFET device comprises performing a first program operation to independently program the first region of the ferroelectric layer, and performing a second program operation to independently program the second region of the ferroelectric layer.

A method, comprising:

• programming a ferroelectric field-effect transistor (FeFET) device to store a given logic state among a plurality of different logic states, wherein the FeFET device comprises first and second source/drain regions, and a gate structure which comprises a ferroelectric layer and a gate electrode disposed over the ferroelectric layer, wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region;
• wherein programming the FeFET device to store the given logic state comprises programming the FeFET device to have a polarization state in which the first and second regions of the ferroelectric layer have respective remnant polarizations with opposite polarities;
• and
• wherein programming the FeFET device comprises performing a program operation to concurrently program the first and second regions of the ferroelectric layer.

A method, comprising:

• programming a ferroelectric field-effect transistor (FeFET) device to store a given logic state among a plurality of different logic states, wherein the FeFET device comprises first and second source/drain regions, and a gate structure which comprises a ferroelectric layer and a gate electrode disposed over the ferroelectric layer, wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region;
• wherein programming the FeFET device to store the given logic state comprises programming the FeFET device to have a polarization state in which the first and second regions of the ferroelectric layer have respective remnant polarizations with opposite polarities;
• wherein the plurality of different logic states comprises:
• a first logic state which corresponds to a first polarization state of the FeFET device in which the first and second regions each comprise a remnant polarization with a first polarity;
• a second logic state which corresponds to a second polarization state of the FeFET device in which the first and second regions each comprise a remnant polarization with a second polarity which is opposite of the first polarity;
• a third logic state which corresponds to a third polarization state of the FeFET device in which the first region comprises a remnant polarization with the first polarity, and the second region comprises a remnant polarization with the second polarity;
• and
• a fourth logic state which corresponds to a fourth polarization state of the FeFET device in which the first region comprises a remnant polarization with the second polarity, and the second region comprises a remnant polarization with the first polarity;
• wherein the first polarization state corresponds to a first threshold voltage of the FeFET device, the second polarization state corresponds to a second threshold voltage of the FeFET device, the third polarization state corresponds to an effective third threshold voltage of the FeFET device, and the fourth polarization state corresponds to an effective fourth threshold voltage of the FeFET device;
• and
• wherein the method further comprises performing a read operation to determine a logic state of the FeFET device, wherein the performing the read operation comprises:
• applying a ground voltage to the first source/drain region of the FeFET device;
• applying a first voltage to the gate electrode of the FeFET device, wherein the first voltage comprises a magnitude which greater than the first and second threshold voltages and the effective third and fourth threshold voltages of the FeFET device;
• applying a second voltage to the second source/drain region of the FeFET device, wherein the second voltage comprises a magnitude which provides a drain-to-source voltage that is sufficient to operate the FeFET device in a saturation mode;
• sensing a current generated by the FeFET device operating in the saturation mode;
• and
• comparing the sensed current to a plurality of reference currents to determine the logic state of the FeFET device.

A method, comprising:

• programming a ferroelectric field-effect transistor (FeFET) device to store a given logic state among a plurality of different logic states, wherein the FeFET device comprises first and second source/drain regions, and a gate structure which comprises a ferroelectric layer and a gate electrode disposed over the ferroelectric layer, wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region;
• wherein programming the FeFET device to store the given logic state comprises programming the FeFET device to have a polarization state in which the first and second regions of the ferroelectric layer have respective remnant polarizations with opposite polarities;
• wherein the plurality of different logic states comprises:
• a first logic state which corresponds to a first polarization state of the FeFET device in which the first and second regions each comprise a remnant polarization with a first polarity;
• a second logic state which corresponds to a second polarization state of the FeFET device in which the first and second regions each comprise a remnant polarization with a second polarity which is opposite of the first polarity;
• a third logic state which corresponds to a third polarization state of the FeFET device in which the first region comprises a remnant polarization with the first polarity, and the second region comprises a remnant polarization with the second polarity;
• and
• a fourth logic state which corresponds to a fourth polarization state of the FeFET device in which the first region comprises a remnant polarization with the second polarity, and the second region comprises a remnant polarization with the first polarity;
• wherein the first polarization state corresponds to a first threshold voltage of the FeFET device, the second polarization state corresponds to a second threshold voltage of the FeFET device, the third polarization state corresponds to an effective third threshold voltage of the FeFET device, and the fourth polarization state corresponds to an effective fourth threshold voltage of the FeFET device;
• and
• wherein the method further comprises performing a read operation to determine a logic state of the FeFET device, wherein performing the read operation comprises:
• performing a first read operation which comprises:
• applying a ground voltage to the first source/drain region of the FeFET device;
• applying a first voltage to the gate electrode of the FeFET device, wherein the first voltage comprises a magnitude which greater than the first and second threshold voltages and the effective third and fourth threshold voltages of the FeFET device;
• applying a second voltage to the second source/drain region of the FeFET device, wherein the second voltage comprises a magnitude which is sufficient to operate the FeFET device in a saturation mode;
• and
• sensing a first current generated by the FeFET device operating in the saturation mode;
• and
• performing a second read operation which comprises:
• applying the ground voltage to the second source/drain region of the FeFET device;
• applying the first voltage to the gate electrode of the FeFET device;
• applying the second voltage to the first source/drain region of the FeFET device to cause the FeFET device to operate in a saturation mode;
• and
• sensing a second current generated by the FeFET device operating in the saturation mode;
• and
• comparing the first and second currents;
• determining that the FeFET device has the third polarization state in response to determining that the first current is less than the second current;
• and
• determining that the FeFET device has the fourth polarization state in response to determining that the first current is greater than the second current.

A method, comprising:

• determining a logic state of a ferroelectric field-effect transistor (FeFET) device, wherein the FeFET device comprises first and second source/drain regions, and a gate structure which comprises a ferroelectric layer, wherein the ferroelectric layer comprises a first region adjacent to the first source/drain region and a second region adjacent to the second source/drain region, wherein the logic state of the FeFET device is encoded by a polarization state of the first and second regions of the ferroelectric layer;
• wherein determining the logic state of the FeFET device comprises:
• performing a first read operation by applying a read voltage having a first read polarity to the first and second source/drain regions of the FeFET device to cause the FeFET device to operate in a saturation mode and generate a first current;
• performing a second read operation by applying the read voltage having a second read polarity, opposite the first read polarity, to the first and second source/drain regions of the FeFET device to cause the FeFET device to operate in a saturation mode and generate a second current;
• comparing the first and second currents;
• determining that the FeFET device has a first logic state which corresponds to a polarization state in which the first region comprises a remnant polarization with a first polarity, and the second region comprises a remnant polarization with a second polarity opposite to the first polarity, in response to determining that the first current is less than the second current;
• and
• determining that the FeFET device has a second logic state which corresponds to a polarization state in which the first region comprises a remnant polarization with the second polarity, and the second region comprises a remnant polarization with the first polarity, in response to determining that the first current is greater than the second current.