Information processing apparatus, display control method, storage medium, substrate processing apparatus, and manufacturing method of article
AssigneeCanon Kabushiki Kaisha
InventorMasahiro Kimura
Life of this patent
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Abstract
An information processing apparatus configured to control display on a user interface includes an acquisition unit configured to acquire recipe data regarding a processing condition of a substrate processing apparatus configured to process a substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus, and a display control unit configured to perform control to display, on the user interface, information regarding the layout data and information regarding the recipe data related to the layout data, the layout data and the recipe data being acquired by the acquisition unit, in association with each other.
Claims13
An information processing apparatus configured to control display on a user interface, the information processing apparatus comprising;
- an acquisition unit configured to acquire recipe data regarding a processing condition of a substrate processing apparatus configured to process a substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus;
- and
- a display control unit configured to perform control to display, on the user interface, information regarding the layout data and information regarding the recipe data related to the layout data, the layout data and the recipe data being acquired by the acquisition unit, in association with each other.
A display control method of controlling display on a user interface, the display control method comprising:
- acquiring recipe data regarding a processing condition of a substrate processing apparatus configured to process a substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus;
- and
- performing display control to display, on the user interface, information regarding the acquired layout data and information regarding the acquired recipe data related to the layout data in association with each other.
A storage medium storing a program that causes a computer to execute a display control method of controlling display on a user interface, the display control method comprising:
- acquiring recipe data regarding a processing condition of a substrate processing apparatus configured to process a substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus;
- and
- performing display control to display, on the user interface, information regarding the acquired layout data and information regarding the acquired recipe data related to the layout data in association with each other.
A substrate processing apparatus configured to process a substrate, the substrate processing apparatus comprising:
- an information processing apparatus configured to control display on a user interface,
- wherein the information processing apparatus includes:
- an acquisition unit configured to acquire recipe data regarding a processing condition of the substrate processing apparatus to process the substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus;
- and
- a display control unit configured to perform control to display, on the user interface, information regarding the layout data and information regarding the recipe data related to the layout data, the layout data and the recipe data being acquired by the acquisition unit, in association with each other.
A manufacturing method of an article, the manufacturing method comprising:
- processing a substrate using a substrate processing apparatus;
- and
- manufacturing an article from the processed substrate,
- wherein the substrate processing apparatus includes an information processing apparatus configured to control display on a user interface,
- wherein the information processing apparatus includes:
- an acquisition unit configured to acquire recipe data regarding a processing condition of the substrate processing apparatus to process the substrate and layout data regarding a layout of a processed portion of the substrate processed by the substrate processing apparatus;
- and
- a display control unit configured to perform control to display, on the user interface, information regarding the layout data and information regarding the recipe data related to the layout data, the layout data and the recipe data being acquired by the acquisition unit, in association with each other.
Dependencies are inferred from the claim text.