Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate
AssigneeEbara Corporation
InventorsFujihiko Toyomasu, Junji Kunisawa
Life of this patent
Estimating the term…
Abstract
There is provided an apparatus for supplying liquid, comprising a flow controller configured to measure a flow rate of a liquid and control the flow rate based on a measurement value; a first valve connected with the flow controller to control supply of a first liquid to the flow controller; a second valve connected with the flow controller to control supply of a second liquid to the flow controller; and a control device configured to control the first valve and the second valve, wherein the control device switches over the first valve and the second valve with providing a delay time between an open/closed switchover time of the first valve and an open/closed switchover time of the second valve.
Claims14
An apparatus for supplying liquid, comprising:
- a flow controller configured to measure a flow rate of a liquid and control the flow rate based on a measurement value;
- a first valve connected with the flow controller to control supply of a first liquid to the flow controller;
- a second valve connected with the flow controller to control supply of a second liquid to the flow controller;
- and
- a control device configured to control the first valve and the second valve,
- wherein the flow controller comprises a flowmeter configured by either a differential pressure-type flowmeter or an ultrasonic flowmeter configured to measure the flow rate of the liquid in a piping;
- and a flow control valve configured to control a flow rate of the first liquid or a flow rate of the second liquid to a set flow rate by feedback control based on a measurement value of the flowmeter, and
- in a case of switching over between the supply of the first liquid and the supply of the second liquid to the flow controller by switching over between an open state and a closed state of the first valve and between an open state and a closed state of the second valve, the control device switches over the first valve and the second valve with providing a delay time between an open/closed switchover time of the first valve and an open/closed switchover time of the second valve.
(canceled)
A method of supplying a liquid by a flow controller, wherein the flow controller comprises a flowmeter configured by either a differential pressure-type flowmeter or an ultrasonic flowmeter configured to measure a flow rate of the liquid in a piping;
- and a flow control valve configured to control a flow rate of a first liquid or a flow rate of a second liquid to a set flow rate by feedback control based on a measurement value of the flowmeter,
- the method comprising:
- a process of switching over between an open state and a closed state of a first valve configured to control supply of the first liquid to the flow controller;
- and
- a process of switching over between an open state and a closed state of a second valve configured to control supply of the second liquid to the flow controller, wherein
- in a case of switching over between the supply of the first liquid and the supply of the second liquid to the flow controller by switching over between the open state and the closed state of the first valve and between the open state and the closed state of the second valve, the method switching over the first valve and the second valve with providing a delay time between an open/closed switchover time of the first valve and an open/closed switchover time of the second valve.
A non-transitory computer readable recording medium configured to store therein a program that causes a computer to perform a process of supplying a liquid by a flow controller, wherein the flow controller comprises a flowmeter configured by either a differential pressure-type flowmeter or an ultrasonic flowmeter configured to measure a flow rate of the liquid in a piping;
- and a flow control valve configured to control a flow rate of a first liquid or a flow rate of a second liquid to a set flow rate by feedback control based on a measurement value of the flowmeter,
- wherein the process comprises:
- a process of switching over between an open state and a closed state of a first valve configured to control supply of the first liquid to the flow controller;
- and
- a process of switching over between an open state and a closed state of a second valve configured to control supply of the second liquid to the flow controller.
- in a case of switching over between the supply of the first liquid and the supply of the second liquid to the flow controller by switching over between the open state and the closed state of the first valve and between an open state and a closed state of the second valve, a process of switching over the first valve and the second valve with providing a delay time between an open/closed switchover time of the first valve and an open/closed switchover time of the second valve.
Dependencies are inferred from the claim text.