Method for generating a control scheme and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsMarc HAUPTMANN, Amir Bin ISMAIL, Rizvi RAHMAN, Jiapeng LI
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Abstract
A method for generating a sampling scheme for a device manufacturing process, the method including: obtaining a measurement data time series of a plurality of processed substrates; transforming the measurement data time series to obtain frequency domain data; determining, using the frequency domain data, a temporal sampling scheme; determining an error offset introduced by the temporal sampling scheme on the basis of measurements on substrates performed according to the temporal sampling scheme; and determining an improved temporal sampling scheme to compensate the error offset.
Claims20
A method for generating a sampling scheme for a device manufacturing process, the method comprising:
- obtaining a measurement data time series of a plurality of processed substrates;
- transforming, by a hardware computer system, the measurement data time series to obtain frequency domain data;
- determining, using the frequency domain data, a temporal sampling scheme;
- determining an error offset introduced by the temporal sampling scheme on the basis of measurements on substrates performed according to the temporal sampling scheme;
- and
- determining an improved temporal sampling scheme to compensate the said error offset.
A computer program product comprising a non-transitory computer-readable medium having instructions therein, the instructions, when executed by a computer system, configured to cause the computer system to at least:
- obtain a measurement data time series of a plurality of processed substrates;
- transform the measurement data time series to obtain frequency domain data;
- determine, using the frequency domain data, a temporal sampling scheme;
- determine an error offset introduced by the temporal sampling scheme on the basis of measurements on substrates performed according to the temporal sampling scheme;
- and
- determine an improved temporal sampling scheme to compensate the error offset.
Dependencies are inferred from the claim text.