Chemical liquid circulation apparatus, chemical liquid dispensing apparatus, and chemical liquid supply system having the same

A chemical liquid circulation apparatus comprising:

• a supply flow path configured to supply a chemical liquid to an external device;
• and
• a recovery flow path configured to collect the chemical liquid from the external device and to resupply the collected chemical liquid to the supply flow path,
• wherein the supply flow path comprises a circulation pump configured to pump the chemical liquid, a filter disposed at a rear end of the circulation pump and configured to filter out particles from the chemical liquid, and a chemical liquid storage unit in fluid communication with the supply flow path and the recovery flow path.

A chemical liquid dispensing apparatus comprising:

• an arm;
• a syringe portion connected to the arm, the syringe portion comprising an internal space;
• a syringe pump disposed in the internal space and configured to adjust a pressure of the internal space;
• a nozzle portion in fluid communication with the syringe portion and configured to draw a liquid therein and discharge the liquid therefrom in response to operation of the syringe pump, wherein the nozzle portion comprises a light-transmissive material;
• and
• a cleaning liquid valve unit in fluid communication with the syringe portion and configured to supply a cleaning liquid to the internal space.