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US 2022/0187720 A1Published application
Transport System Having a Magnetically Levitated Transportation Stage
AssigneesMassachusetts Institute of Technology, ASML Holding N.V.
InventorsLei ZHOU, David L. TRUMPER, Ruvinda GUNAWARDANA
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Abstract
A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage
Claims20
A transportation stage comprising:
- (a) a base portion having first and second sides and first and second opposing surfaces, said base portion configured to hold a reticle on at least one of the first and second opposing surfaces;
- and
- (b) a first conveyor portion coupled to a first side of said base portion, said first conveyor portion configured to hold at least one bearing secondary and at least one motor secondary;
- and
- (c) a second conveyor portion coupled to a second, different side of said base portion, said second conveyor portion configured to hold at least one bearing secondary and at least one motor secondary;
- (d) at least one bearing secondary and at least one motor secondary disposed on a first surface of said first conveyor portion;
- and
- (e) at least one bearing secondary and at least one motor secondary disposed on a first surface of said second conveyor portion.
5 more elements
A reticle transportation system comprising:
- a transportation stage drive system;
- a reticle transportation stage capable of being magnetically levitate and moved by said transportation stage drive system;
- and
- a transportation stage controller coupled to said transportation stage drive system wherein in response to signals provided thereto from said transportation stage controller, said transportation stage drive system moves said reticle transportation stage.
1 more element
A photolithography system comprising:
- a reticle transportation system, said reticle transportation system comprising:
- a transportation stage drive system;
- a reticle transportation stage capable of being magnetically levitated and moved by said transportation stage drive system;
- and
- a transportation stage controller coupled to said transportation stage drive system wherein in response to signals provided thereto from said transportation stage controller, said transportation stage drive system moves said reticle transportation stage;
- and
- an enclosure disposed to define a clean vacuum environment and a dirty vacuum environment and wherein said reticle transportation stage is disposed in the clean vacuum environment and at least portions of said transportation stage drive system are disposed in the dirty vacuum environment.
4 more elements
Dependencies are inferred from the claim text.