Optical ring modulator with photonic crystal
AssigneeGlobalFoundries U.S. Inc.
InventorsMichal Rakowski, Yusheng Bian, Won Suk Lee, Roderick A. Augur
Life of this patent
Estimating the term…
Abstract
Embodiments of the disclosure provide an optical ring modulator. The optical ring modulator includes waveguide with a first semiconductor material of a first doping type, and a second semiconductor material having a second doping type adjacent the first semiconductor material. A P-N junction is between the first semiconductor material and the second semiconductor material. A plurality of photonic crystal layers, each embedded within the first semiconductor material or the second semiconductor material, has an upper surface that is substantially coplanar with an upper surface of the waveguide structure.
Claims20
An optical ring modulator, comprising:
- a waveguide structure, including:
- a first semiconductor material having a first doping type, and
- a second semiconductor material adjacent the first semiconductor material and having a second doping type opposite the first doping type, defining a P-N junction within the waveguide structure;
- and
- a plurality of photonic crystal structures, each photonic crystal structure embedded within the first semiconductor material or the second semiconductor material of the waveguide structure, and having an upper surface that is substantially coplanar with an upper surface of the waveguide structure.
An optical ring modulator, comprising:
- a waveguide structure, including:
- a first semiconductor material having a first doping type, and
- a second semiconductor material adjacent the first semiconductor material and having a second doping type opposite the first doping type, defining a P-N junction within the waveguide structure;
- a first photonic crystal layer on an upper surface of the first semiconductor material;
- a first plurality of semiconductor pillars having the first doping type, each semiconductor pillar of the first plurality of semiconductor pillars embedded within the first photonic crystal layer, and having a top surface substantially coplanar with a top surface of the first photonic crystal layer;
- a second photonic crystal layer on an upper surface of the second semiconductor material;
- and
- a second plurality of semiconductor pillars having the second doping type, each semiconductor pillar of the first plurality of semiconductor pillars embedded within the second photonic crystal layer, and having a top surface substantially coplanar with a top surface of the second photonic crystal layer.
An optical ring modulator, comprising:
- a waveguide structure, including:
- a first semiconductor material having a first doping type, and
- a second semiconductor material adjacent the first semiconductor material and having a second doping type opposite the first doping type, defining a P-N junction within the waveguide structure;
- a first plurality of photonic crystal pillars within the first semiconductor material, each photonic crystal pillar of the first plurality of photonic crystal pillars having a bottom surface that is substantially coplanar with a bottom surface of the first semiconductor material;
- a first photonic crystal layer on the first plurality of photonic crystal pillars and within a recessed region of the first semiconductor material;
- a second plurality of photonic crystal pillars within the second semiconductor material, each photonic crystal pillar of the second plurality of photonic crystal pillars having a bottom surface that is substantially coplanar with a bottom surface of the second semiconductor material;
- and
- a second photonic crystal layer on the second plurality of photonic crystal pillars and within a recessed region of the second semiconductor material.
Dependencies are inferred from the claim text.