Hybrid eo polymer modulator with ald sealant layer
AssigneeLightwave Logic, Inc.
InventorsMichael Lebby, Zhiming Liu, Baoquan Chen
Life of this patent
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Abstract
An EO polymer modulator with conformal atomic layer deposition sealant layers including an active region of a device material stack with an elongated tapered active section positioned on a passive waveguide core. The device material stack supported on a substrate with the passive waveguide core defining light input and light output side surfaces. A conformal atomic layer deposition sealant layer overlying the device material stack including the light input and light output side surfaces, the conformal atomic layer deposition sealant layer defining windows for the light input and light output side surfaces.
Claims19
An EO polymer modulator with conformal atomic layer deposition sealant layers comprising:
- an active region of a device material stack including an elongated tapered active section positioned on a passive waveguide core;
- the device material stack supported on a substrate with the passive waveguide core defining light input and light output side surfaces;
- and
- a conformal atomic layer deposition sealant layer overlying the device material stack including the light input and light output side surfaces, the conformal atomic layer deposition sealant layer defining windows for the light input and light output side surfaces.
An EO polymer modulator with conformal atomic layer deposition sealant layers comprising:
- a substrate with a cladding layer formed on a surface;
- a passive waveguide core, having a cross-sectional area, formed in the cladding layer and including an elongated tapered active section;
- an elongated trench in the cladding layer, the elongated tapered active section of the waveguide core positioned in the elongated trench;
- electrodes positioned on a surface of the cladding layer on opposite sides of the elongated trench;
- an elongated strip of EO polymer overlying the elongated tapered active section of the waveguide core, the elongated strip of EO polymer positioned between and parallel with the electrodes and coplanar with the electrodes;
- and
- a conformal sealant layer overlying the elongated strip of EO polymer and sealing sides and top of the passive waveguide core and the elongated strip of EO polymer.
A method of fabricating an EO polymer modulator with conformal atomic layer deposition sealant layers comprising the steps of:
- providing a substrate and forming an active region of a device material stack including an elongated tapered active section positioned on a passive waveguide core, the device material stack supported on the substrate with the passive waveguide core defining light input and light output side surfaces;
- using atomic layer deposition deposit a plurality of atomic layers over the device material stack to form a conformal sealant layer over an upper surface and light input and light output side surfaces of the device material stack.
Dependencies are inferred from the claim text.