Optical element arrangements for varying beam parameter product in laser delivery systems
AssigneePanasonic Connect North America, Division of Panasonic Corporation of North America
InventorsWang-Long ZHOU, Parviz TAYEBATI, Bien CHANN, Francisco VILLARREAL-SAUCEDO
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Abstract
In various embodiments, laser delivery systems feature one or more optical elements for receiving a radiation beam and altering the spatial power distribution thereof, a lens manipulation system for changing a position of at least one optical element within the path of the radiation beam, and a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on a workpiece.
Claims20
-35. (canceled)
A laser delivery system for receiving and altering a spatial power distribution of a radiation beam from a beam source and focusing the radiation with the altered spatial power distribution onto a workpiece, the system comprising:
- a triplet collimator for increasing a divergence of the radiation beam;
- disposed optically downstream of the triplet collimator, a focusing lens for receiving the radiation beam and focusing the beam toward the workpiece;
- disposed optically upstream of the focusing lens, at least one optical element for receiving the radiation beam and altering the spatial power distribution thereof;
- a lens manipulation system for changing a position of the at least one optical element within a path of the radiation beam;
- and
- a controller for controlling the lens manipulation system to achieve a target altered spatial power distribution on the workpiece.
Dependencies are inferred from the claim text.