Compact line scan mems time of flight system with actuated lens
AssigneesSTMicroelectronics (Research & Development) Limited, STMicroelectronics S.r.l.
InventorsChristopher TOWNSEND, Roberto CARMINATI
Life of this patent
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Abstract
Disclosed herein is an optical module including a substrate, with an optical detector, laser emitter, and support structure being carried by the substrate. An optical layer includes a fixed portion carried by the support structure, a movable portion affixed between opposite sides of the fixed portion by a spring structure, and a lens system carried by the movable portion. The movable portion has at least one opening defined therein across which the lens system extends, with at least one supporting portion extending across the at least one opening to support the lens system. The optical layer further includes a MEMS actuator for in-plane movement of the movable portion with respect to the fixed portion.
Claims25
An optical module, comprising:
- a substrate;
- an optical detector carried by the substrate;
- a laser emitter carried by the substrate;
- a support structure carried by the substrate;
- an optical layer comprising:
- a fixed portion carried by the support structure;
- a movable portion affixed between opposite sides of the fixed portion by a spring structure;
- a lens system carried by the movable portion;
- wherein the movable portion has at least one opening defined therein across which the lens system extends, with at least one supporting portion extending across the at least one opening to support the lens system;
- and
- a MEMS actuator for in-plane movement of the movable portion with respect to the fixed portion.
An optical module, comprising:
- a substrate;
- an optical circuit carried by the substrate;
- an optical layer comprising:
- a fixed portion carried by the substrate;
- a movable portion affixed between opposite sides of the fixed portion by a spring structure;
- a lens system carried by the movable portion, the lens system being aligned with the optical circuit;
- wherein the movable portion has at least one opening defined therein across which the lens system extends, with at least one supporting portion extending across the at least one opening to support the lens system;
- a comb drive formed by respective features of the fixed portion and movable portion;
- and
- actuation circuitry configured to apply a drive signal to the comb drive to thereby cause electrostatic actuation to the comb drive resulting in the movable portion of the optical layer oscillating back and forth between opposite sides of the fixed portion.
Dependencies are inferred from the claim text.