Method of mode coupling detection and damping and usage for electrostatic mems mirrors

A scanning system, comprising:

• a microelectromechanical system (MEMS) scanning structure configured to rotate about an axis with a desired rotational mode of movement based on at least one driving signal;
• a plurality of comb-drives configured to drive the MEMS scanning structure about the axis according to the desired rotational mode of movement based on the at least one driving signal, wherein each comb-drive comprises a rotor comb electrode and a stator comb electrode that form a capacitive element that has a capacitance that depends on the deflection angle of the MEMS scanning structure;
• a driver configured to generate the at least one driving signal;
• a sensing circuit selectively coupled to at least a subset of the plurality of comb-drives for receiving sensing signals therefrom, wherein each sensing signal is representative of the capacitance of a corresponding comb-drive;
• and
• a processing circuit configured to determine a scanning direction of the MEMS scanning structure in the desired rotational mode of movement based on the sensing signals.