Mirror assembly and optical assembly comprising same
AssigneeCarl Zeiss SMT GmbH
InventorsAlexandra PAZIDIS, Kerstin HILD, Thilo POLLAK
Life of this patent
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Abstract
A mirror arrangement (30) includes: a substrate (31) with a front side (31a) having a mirror face (32a) reflecting radiation (5), and a rear side (31b) facing away from the front side and on which at least one actuator (27) generating deformations of the mirror face is arranged. A water vapor (36)-sorbing material (33, 42) is formed on the rear side (31b) and forms an adhesive layer (33) for securing the actuator. The layer extends into interspaces (35) between the actuators (27). A surface (33a, 42a) of the water vapor-sorbing material is covered at least partly by a coating (37) which forms a water vapor diffusion barrier.
Claims17
A mirror arrangement comprising:
- a substrate which has a front side having a mirror face for reflecting radiation, and a rear side facing away from the front side and on which at least one actuator for generating deformations of the mirror face is disposed,
- wherein a water vapor sorbing material is formed on the rear side of the substrate,
- wherein a surface of the water vapor-sorbing material is covered at least partly by a coating which forms a water vapor diffusion barrier, and
- wherein the diffusion barrier comprises at least one material selected from the group consisting essentially of:
- Al2O3, SiO2, Ta2O5, TiO2, HfO2, ZrO2, Nb2O5, La2O3, Ta, Ti, Ru, SixCyOzHv, parylenes, fluoropolymers, and mixtures thereof.
A mirror arrangement comprising:
- a substrate which has a front side having a mirror face for reflecting radiation, and a rear side facing away from the front side and on which at least one actuator for generating deformations of the mirror face is disposed,
- wherein a water vapor sorbing material is formed on the rear side of the substrate and forms an adhesive layer,
- wherein a surface of the water vapor-sorbing material is covered at least partly by a coating which forms a water vapor diffusion barrier, and
- wherein a surface of the adhesive layer is covered at least partly by a filling material having an elasticity modulus (E1) that is less than the elasticity modulus (E2) of the adhesive layer.
A mirror arrangement comprising:
- a substrate which has a front side having a mirror face for reflecting radiation, and a rear side facing away from the front side and on which at least two actuators for generating deformations of the mirror face are disposed,
- wherein a water vapor sorbing material is formed on the rear side of the substrate and forms an adhesive layer,
- wherein a surface of the water vapor-sorbing material is covered at least partly by a coating which forms a water vapor diffusion barrier, and
- wherein the surface of the water vapor-sorbing material is covered at least partly by a flexible material.
A mirror arrangement comprising:
- a substrate which has a front side having a mirror face for reflecting radiation, and a rear side facing away from the front side and on which at least two actuators for generating deformations of the mirror face are disposed,
- wherein a water vapor sorbing material is formed on the rear side of the substrate and forms an adhesive layer,
- wherein a surface of the water vapor-sorbing material is covered at least partly by a coating which forms a water vapor diffusion barrier, and
- wherein the adhesive layer in interspaces between the actuators does not completely cover the rear side of the substrate.
A mirror arrangement comprising:
- a substrate which has a front side having a mirror face for reflecting radiation, and a rear side facing away from the front side and on which at least two actuators for generating deformations of the mirror face are disposed,
- wherein a water vapor sorbing material is formed on the rear side of the substrate and forms an adhesive layer,
- wherein a surface of the water vapor-sorbing material is covered at least partly by a coating which forms a water vapor diffusion barrier, and
- wherein the adhesive layer in interspaces between the actuatorsprojects over the actuators.
Dependencies are inferred from the claim text.