Charged particle beam device, computer, and signal processing method for charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorsHiroshi Oinuma, Wen Li, Masashi Wada
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Abstract
A charged particle beam device includes a detector 109 converting a photon emitted by a scintillator into an electric signal and a signal processing unit 110 processing the electric signal from the detector 109. The signal processing unit 110 detects a peak position of the electric signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.
Claims14
A charged particle beam device comprising:
- a detector converting a photon emitted by a scintillator into an electric signal;
- and
- a signal processing unit processing the electric signal from the detector,
- wherein the signal processing unit detects a peak position of the electric signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.
A computer comprising:
- a memory storing, as a target signal, an electric signal from a detector of a charged particle beam device or a pixel signal representing a change in luminance of a detection image generated based on the electric signal;
- and
- a processor processing the target signal,
- wherein the processor detects a peak position of the target signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.
A signal processing method for a charged particle beam device, comprising:
- reading a target signal from a memory storing, as the target signal, an electric signal from a detector of a charged particle beam device or a pixel signal representing a change in luminance of a detection image generated based on the electric signal;
- and
- detecting a peak position of the target signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifying the peak position based on the steepness of the rising section and the steepness of the falling section.
Dependencies are inferred from the claim text.