Slope, p-component and s-component measurement

An optical scanning system, comprising:

• a radiating source capable of outputting a source light beam, wherein the optical scanner is configured to output the source light beam that is directed towards a sample at an incident angle;
• a de-scan lens that is configured to output a de-scanned light beam, wherein the de-scanned light beam is created by focusing light reflected from the sample, and wherein the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the light beam irradiates the sample;
• a focusing lens that is configured to output a focused light beam, wherein the focused light beam is created by focusing the de-scanned light beam output by the de-scan lens;
• a collimating lens that is configured to output a collimated light beam, wherein the collimated light beam is created by collimating the focused light beam output by the focusing lens,
• a polarizing beam splitter that is configured to be irradiated by the collimated light beam, and
• a first detector that is configured to be irradiated by at least a portion of the collimated light beam that is not reflected by the polarizing beam splitter.