Method for calibrating nano measurement scale and standard material used therein

A method of calibrating a nano measurement scale using a standard material, the method comprising:

• measuring widths of a plurality of nanostructures included in the standard material and having pre-designated certified values of different sizes by a microscope;
• determining measured values for the widths of each of the plurality of nanostructures measured by the microscope based on a predetermined criterion;
• and
• calibrating a measurement scale of the microscope based on the certified values and the measured values,
• wherein the standard material includes the plurality of nanostructures having the widths set as the certified values of the pre-designated certified values of different sizes and spaced apart from each other by a predetermined interval, and a plurality of intermediate layers interposed in the intervals where the plurality of nanostructures are spaced apart,
• on one surface of the standard material in which the plurality of nanostructures and the plurality of intermediate layers are alternately stacked, a plurality of concave portions in which each of the plurality of intermediate layers is removed to a predetermined depth, and a plurality of convex portions in which each of the plurality of nanostructures protrudes from bottoms of the plurality of concave portions are formed, and
• the one surface of the standard material is perpendicular to an interface between the plurality of nanostructures and the plurality of intermediate layers.