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AssigneesHitachi, Ltd., Toyota Jidosha Kabushiki Kaisha
InventorsAkinori ASAHARA, Hidekazu MORITA, Takuya KANAZAWA, Kanta ONO, Masao YANO, Tetsuya SHOJI
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Automated analysis of particle beam measurement results is facilitated by a device that calculates a spatial parameter distribution representing spatial structure of a sample based on a scattering pattern corresponding to projection of the spatial structure of the sample to wavenumber space, the projection being obtained by detecting scattering of a particle beam which enters the sample and intersects with the sample. The device includes a section to provide estimates for signals on the scattering pattern in association with at which point on a spatial parameter distribution of the sample interactions occur during scattering; a section to aggregate estimation results of the interaction estimation section to calculate a spatial parameter distribution of a sample matching an aggregated result; and a section to perform alternately and repeatedly estimation in the interaction estimation section and calculation in the parameter distribution calculation section in order to improve estimation accuracy in spatial parameter distributions.
A particle beam measurement results analysis device to calculate a spatial parameter distribution representing spatial structure of a sample based on a scattering pattern corresponding to projection of the spatial structure of the sample to wavenumber space, the projection being obtained by detecting scattering of a particle beam which enters the sample and intersects with the sample, the device comprising:
A particle beam measurement results analysis method executed by an information processing device, comprising:
Dependencies are inferred from the claim text.