Support structure for micro-vibrator and method of manufacturing inertial sensor

A method of manufacturing an inertial sensor comprising:

• preparing a micro-vibrating body including a curved surface portion having an annular curved surface in a hollow state and a recess recessed from the curved surface portion;
• preparing a support member having a rod and an adhesive member arranged at a tip end of the rod;
• inserting the tip end of the rod into the recess of the micro-vibrating body to bring the adhesive member into close contact with a connecting surface which is an internal bottom surface of the recess;
• melting and solidifying the adhesive member in a state where the adhesive member is in close contact with the connecting surface, to form a support structure in which the rod and the micro-vibrating body are connected to each other;
• forming a conductive layer on a surface of the micro-vibrating body after forming the support structure;
• applying a joining member to an inner region of a frame-shaped mounting portion of a substrate in which the recess of the micro-vibrating body is mounted;
• conveying the micro-vibrating body using the rod of the support structure to bring a mounting surface, which is a bottom surface of the micro-vibrating body outside of the recess, into contact with the joining member;
• joining the micro-vibrating body to the substrate by solidifying the joining member after heating the substrate to melt the joining member and the adhesive member;
• and
• removing the rod from the micro-vibrating body after joining the micro-vibrating body to the substrate.