Surface contour measurement

An optical scanning system, comprising:

• a radiating source capable of outputting a source light beam, wherein the optical scanner is configured to output the source light beam that is directed towards a sample at an incident angle;
• a de-scan lens that is configured to output a de-scanned light beam, wherein the de-scanned light beam is created by focusing light reflected from the sample, and wherein the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the light beam irradiates the sample;
• a focusing lens that is configured to output a focused light beam, wherein the focused light beam is created by focusing the de-scanned light beam output by the de-scan lens;
• a first non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam;
• a second non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam that is reflected by the first non-polarizing beam splitter;
• and
• a first detector that is located at approximately one focal length of the focusing lens from the focusing lens, wherein the first detector is configured to be irradiated by at least a portion of the focused light beam that is not reflected by the second non-polarizing beam splitter.