US 2022/0187033 A1 · FREQUENCY LOCK IN ACTIVE MEMS COOLING SYSTEMS

Abstract

A system includes an active micro-electric mechanical system (MEMS) cooling system and a drive system. The MEMS cooling system includes cooling element(s) that direct fluid toward a surface of heat-generating structure(s) when driven to vibrate by a driving signal having a frequency and an input voltage. The drive system is coupled to the active MEMS cooling system and provides the driving signal. The drive system includes a power source and a feedback controller providing a feedback signal corresponding to a proximity to a resonant state of the at least one cooling element. The drive system adjusts at least one of the frequency and the input voltage based on the feedback signal such that the frequency corresponds to the resonant state of the cooling element(s). The input voltage does not exceed a maximum safe operating voltage for the cooling element(s).

Claims20

Dependent claims

A system, comprising:

an active micro-electric mechanical system (MEMS) cooling system including at least one cooling element configured to direct a fluid toward a surface of at least one heat-generating s structure when driven to vibrate by a driving signal having a frequency and an input voltage;
and
a drive system coupled to the active MEMS cooling system for providing the driving signal, the drive system including a power source for the driving signal and a feedback controller having a feedback signal corresponding a proximity to a resonant state of the at least one cooling element, the drive system being configured to adjust at least one of the frequency and the input voltage based on the feedback signal such that the frequency and the input voltage correspond to the resonant state of the at least one cooling element, wherein the input voltage does not exceed a maximum safe operating voltage for the at least one cooling element.

A method, comprising:

providing a driving signal to an active micro-electronic mechanical system (MEMS) cooling system, the active MEMS cooling system including at least one cooling element configured to direct a fluid toward a surface of at least one heat-generating structure when driven to vibrate by the driving signal having a frequency and an input voltage, the an input voltage for the at least one cooling element not exceeding a maximum safe operating voltage for the at least one cooling element;
monitoring a characteristic of the active MEMS cooling system to provide a feedback signal corresponding to a proximity to a resonant state of the active MEMS cooling system;
and
adjusting at least one of the frequency and the input voltage based on the feedback signal such that the frequency corresponds to the resonant state of the active MEMS cooling system.

1 more element

Dependencies are inferred from the claim text.

Frequency lock in active mems cooling systems

Life of this patent

Frequency lock in active mems cooling systems

Life of this patent

Abstract

Claims20