Vacuum pump, casing, and inlet port flange
AssigneeEdwards Japan Limited
InventorsNahoko Yoshihara, Yoshiyuki Sakaguchi, Yohei Ogawa
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AssigneeEdwards Japan Limited
InventorsNahoko Yoshihara, Yoshiyuki Sakaguchi, Yohei Ogawa
Estimating the term…
To provide a vacuum pump which separates and constructs an inlet port flange and a casing (outer cylinder) as two components to reduce weight while retaining required strength and which is consequently capable of reducing manufacturing cost. In a vacuum pump, an inlet port flange and a casing (outer cylinder) are separated from each other and constructed as different members. The inlet port flange uses stainless steel as a material thereof and the casing (outer cylinder) use aluminum as a material thereof. The components are fastened to each other by bolts and sealed by an O-ring in order to maintain a vacuum property during assembly of the vacuum pump. Accordingly, a weight of the vacuum pump can be reduced while maintaining strength of the inlet port flange.
A vacuum pump, comprising:
A casing used in a vacuum pump, the casing including:
An inlet port flange used in a vacuum pump including:
Dependencies are inferred from the claim text.