Analysis device of vacuum pump, vacuum pump, storage medium recording analysis program, and analysis method
AssigneeShimadzu Corporation
InventorKiyonori HIROTA
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Abstract
An analysis device of a vacuum pump discharging gas from a vacuum container in which a process for a target object is performed, comprises: an information generation section configured to generate information on a load on the vacuum pump due to an accumulated substance based on an integrated value of a physical quantity regarding rotary drive of a rotor of the vacuum pump in at least part of a period of the process.
Claims14
An analysis device of a vacuum pump discharging gas from a vacuum container in which a process for a target object is performed, comprising:
- an information generation section configured to generate information on a load on the vacuum pump due to an accumulated substance based on an integrated value of a physical quantity regarding rotary drive of a rotor of the vacuum pump in at least part of a period of the process.
A storage medium recording an analysis program causing a computer to perform analysis processing of a vacuum pump discharging gas from a vacuum container in which a process for a target object is performed,
- the analysis processing including
- information generation processing of generating information on a load on the vacuum pump due to an accumulated substance based on an integrated value of a physical quantity regarding rotary drive of a rotor of the vacuum pump in at least part of a period of the process.
An analysis method of a vacuum pump discharging gas from a vacuum container in which a process for a target object is performed, including:
- an information generation step to generate information on a load on the vacuum pump due to an accumulated substance based on an integrated value of a physical quantity regarding rotary drive of a rotor of the vacuum pump in at least part of a period of the process.
Dependencies are inferred from the claim text.