Holder for holding substrate and system for plating
AssigneeEbara Corporation
InventorsShota Moriyama, Matsutaro Miyamoto
Life of this patent
Estimating the term…
Abstract
There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact.
Claims6
A holder for holding a substrate comprising:
- a first holding member having a first opening portion for exposing a first surface of the substrate;
- and
- a second holding member configured to hold the substrate together with the first holding member,
- wherein the first holding member has:
- a first external connection portion;
- at least one first substrate contact configured to be brought into contact with the first surface of the substrate to supply an electric current to the first surface of the substrate;
- and
- a first conductive path member configured to be brought into connection with the first external connection portion and the at least one first substrate contact,
- wherein the first substrate contact is attached to the first conductive path member in a removable manner, and
- wherein the first conductive path member is disposed within a space that is sealed up by the first holding member and the second holding member and is detachably attached to a main body of the first holding member.
A system for plating, comprising:
- a holder for holding a substrate;
- a substrate attaching/detaching portion configured to attach/detach the substrate to/from the holder;
- and
- a plating tank configured to apply a plating treatment to the holder holding the substrate,
- wherein the holder has:
- a first holding member having a first opening portion for exposing a first surface of the substrate;
- and
- a second holding member configured to hold the substrate together with the first holding member,
- wherein the first holding member has:
- a first external connection portion;
- at least one first substrate contact configured to be brought into contact with the first surface of the substrate to supply an electric current to the first surface of the substrate;
- and
- a first conductive path member configured to be brought into connection with the first external connection portion and the at least one first substrate contact,
- wherein the first substrate contact is attached to the first conductive path member in a removable manner, and
- wherein the first conductive path member is disposed within a space that is sealed up by the first holding member and the second holding member and is detachably attached to a main body of the first holding member.
Dependencies are inferred from the claim text.