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AssigneeASM IP Holding B.V.
InventorsAniket Nitin Patil, Saket Rathi, Sam Kim, Shiva K.T. Rajavelu Muralidhar
Estimating the term…
A fixture is provided. The fixture includes a base, a turntable, a first sensor, and a second sensor. The turntable is supported on the base, is rotatable about a rotation axis, and is configured to slidably seat a susceptor assembly for rotation about the rotation axis. The first sensor is fixed relative to the base, is radially offset from the rotation axis, and is configured to determine ex-situ runout of the susceptor assembly. The second sensor is fixed relative to the first sensor, is axially offset from the first sensor, and is configured to determine ex-situ wobble of the susceptor assembly. Fixture arrangements and methods of determining ex-situ runout and ex-situ wobble of susceptor assemblies for semiconductor processing systems are also described.
A fixture for determining runout and wobble in a susceptor assembly, comprising:
A method of determining ex-situ runout and ex-situ wobble of a susceptor assembly, comprising:
Dependencies are inferred from the claim text.