Continuous liner for use in a processing chamber
AssigneeApplied Materials, Inc.
InventorsJames D. Carducci, Kenneth S. Collins, Kartik Ramaswamy
Life of this patent
Estimating the term…
Abstract
Certain embodiments of the present disclosure relate to chamber liners, processing chambers that include chamber liners, and methods of using the same. In one embodiment, a processing chamber comprises a chamber body defining an interior volume and comprising an access port for inserting a substrate into the interior volume; a cathode assembly configured to generate a plasma within the interior volume; and a chamber liner comprising a smooth interior surface that is radially symmetric about a vertical axis of the chamber body. The chamber liner is configured to move between a loading position and an operation position.
Claims14
A processing chamber comprising:
- a chamber body defining an interior volume and comprising an access port for inserting a substrate into the interior volume;
- a cathode assembly configured to generate a plasma within the interior volume;
- and
- a chamber liner comprising a smooth interior surface that is radially symmetric about a vertical axis of the chamber body, the chamber liner being configured to move between a loading position and an operation position, wherein:
- when the chamber liner is in the loading position, the interior volume is accessible by the access port, and
- when the chamber liner is in the operation position, the chamber liner at least partially encloses the interior volume and forms a return path from the cathode assembly to ground.
A chamber liner adapted for use in a processing chamber, the chamber liner comprising:
- a first planar ring having a first inner diameter and a first outer diameter;
- a second planar ring having a second inner diameter and a second outer diameter, wherein the first and second planar rings are spaced apart and arranged along a common central axis;
- and
- a vertical wall coupling the first planar ring to the second planar ring at their respective first and second outer diameters,
- wherein the first planar ring, the second planar ring, and the vertical wall define an interior cavity having smooth interior surface along at least an upper surface of the second planar ring.
14-20. (canceled)
Dependencies are inferred from the claim text.