Super-conformal germanium oxide films
AssigneeApplied Materials, Inc.
InventorsHuiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick
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Abstract
Methods for forming coating films comprising germanium oxide are disclosed. In some embodiments, the films are super-conformal to a feature on the surface of a substrate. The films are deposited by exposing a substrate surface to a germane precursor and an oxidant simultaneously. The germane precursor may be flowed intermittently. The substrate may also be exposed to a second oxidant to increase the relative concentration of oxygen within the super-conformal film.
Claims20
A method for depositing a super-conformal film, the method comprising exposing a substrate surface comprising at least one feature to a germane precursor and a first oxidant to deposit a super-conformal film comprising germanium oxide, the at least one feature having an opening width defined by sidewalls and extending a depth into the substrate, the super-conformal film having a first thickness on the sidewalls greater than a second thickness on the substrate surface outside of the feature.
A method for depositing a super-conformal film, the method comprising exposing a substrate surface comprising at least one feature to a constant flow of a first oxidant and an alternating flow of a germane precursor and a second oxidant to deposit a super-conformal film comprising germanium oxide, the at least one feature having an opening width defined by sidewalls and extending a depth into the substrate, the germane precursor and the second oxidant each having a duty cycle of less than or equal to 25%, the super-conformal film having a first thickness on the sidewalls greater than a second thickness on the substrate surface outside of the feature.
Dependencies are inferred from the claim text.