Improved vapour deposition system, method and moisture control device
AssigneeXefco Pty Ltd
InventorsThomas HUSSEY, Brian CONOLLY, Scott WHITBY
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Abstract
A system for treating a substrate comprising an unwinder adapted to receive and unwind a roll of substrate and a rewinder adapted to rewind the substrate from the unwinder. The system further comprising a physical vapour deposition (PVD) apparatus, a vacuum chamber in which the unwinder, PVD apparatus and rewinder are disposed; and wherein a coating drum of the PVD apparatus has a temperature of between 0° C. and 10° C., and is adapted to increase a desorption rate of the substrate.
Claims20
A system for treating a substrate, the system comprising;
- an unwinder adapted to receive and unwind a roll of substrate;
- a rewinder adapted to rewind the substrate from the unwinder;
- a physical vapour deposition (PVD) apparatus;
- a vacuum chamber in which the unwinder, PVD apparatus and rewinder are disposed;
- and
- wherein a coating drum of the PVD apparatus has a temperature of between 0° C. and 10° C., and is adapted to increase a desorption rate of the substrate.
A method of degassing and applying a PVD treatment to a substrate using a system, the method comprising a degassing stage and a physical vapour deposition (PVD) stage;
- the degassing stage comprising the steps of;
- mounting a roll of substrate on an unwinder in a vacuum chamber;
- sealing the chamber and removing atmosphere from the vacuum chamber to a predetermined pressure;
- heating a coating drum of a physical vapour deposition (PVD) apparatus to 10° C. and activating a heating boat;
- passing the roll of substrate through the system such that the substrate is heated by the coating drum and heating boat to degas the substrate;
- rewinding the substrate after heating;
- and
- the PVD stage comprising the steps of;
- unwinding the substrate and passing the substrate back through the system and evaporating a PVD source material to cause a deposition of the PVD source material on the substrate;
- and
- rewinding the substrate into a roll.
Dependencies are inferred from the claim text.