Surface coating treatment

A method for coating a component body for a part of a plasma processing chamber, comprising:

• forming a first ceramic coating on a surface of a component body, wherein the first ceramic coating has a first side adjacent to the component body and a second side spaced apart from the component body;
• and
• remelting the second side of the first ceramic coating to form a second ceramic coating on the first ceramic coating, wherein the second ceramic coating has a porosity that is less than a porosity of the first ceramic coating and the second ceramic coating has a density that is greater than a density of the first ceramic coating.

A method for coating a component body for a part of a plasma processing chamber, comprising:

• spraying a first ceramic coating on a surface of a component body, wherein the first ceramic coating has a first side adjacent to the component body and a second side spaced apart from the component body;
• and
• spraying a second ceramic coating on the second side of the first ceramic coating, wherein the second ceramic coating has a porosity that is less than a porosity of the first ceramic coating and the second ceramic coating has a density that is greater than a density of the first ceramic coating, wherein spraying the second ceramic coating is at a direction more perpendicular to the surface of the component body than a direction of spraying of the first ceramic coating.

A method for coating a component body of a part of a plasma processing chamber, comprising:

• heating the component body to a temperature above 200° C.;
• and
• forming a ceramic coating on a surface of the component body, while the component body is heated to a temperature above 200° C.

A method for coating a component body of part of a plasma processing chamber, comprising:

• providing a ceramic mixture of a first ceramic component and a second ceramic component, wherein the first ceramic component has a lower melting point than second ceramic component;
• and
• thermal spraying the ceramic mixture onto a plasma facing surface of component body, wherein the thermal spraying heats the ceramic mixture to a temperature that melts the first ceramic component, but does not melt the second ceramic component forming a first ceramic coating.