Yittrium granular powder for thermal spray and thermal spray coating produced using the same
AssigneeKomico Ltd.
InventorsDae Sung Kim, Seong Sik Bang, Jae Im Jeong, Dong Hun Jeong
Life of this patent
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Abstract
The present disclosure relates to an yttrium-based granular powder for thermal spraying. More particularly, the yttrium-based granular powder is a mixture including one or more yttrium compound powders selected from among Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3, and a silica (SiO2) powder. A Y—Si—O intermediate phase is included therein in a content of less than 10 wt %. The thermal spray coating manufactured using the same has a low porosity, and forms a very dense thin film, thus ensuring excellent plasma resistance.
Claims6
An yttrium-based granular powder for thermal spraying, the powder comprising:
- one or more yttrium compound powders selected from among Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3;
- and
- a silica (SiO2) powder,
- wherein an average diameter of the granular powder is 5 to 50 μm, and a Y—Si—O intermediate phase is included in a content of more than 0 wt % and less than 10 wt %.
A method of manufacturing an yttrium-based granular powder for thermal spraying, the method comprising:
- (a) mixing one or more yttrium compound powders selected from among Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3 with a silica (SiO2) powder to manufacture a mixture;
- (b) assembling the mixture to manufacture the granular powder;
- and
- (c) calcining the granular powder at 1200 to 1450° C. to obtain the yttrium-based granular powder for thermal spraying,
- wherein the yttrium-based granular powder for thermal spraying includes a Y—Si—O intermediate phase in a content of more than 0 wt % and less than 10 wt % and has an average diameter of 5 to 50 μm.
Dependencies are inferred from the claim text.