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US 2022/0185980 A1Published application
Perfluoroelastomer molded article and protective member
AssigneeAGC Inc.
InventorsMasahide YODOGAWA, Makoto HONDA
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Abstract
To provide perfluoroelastomer molded product and a protective member, excellent in plasma resistance and fitting property. A perfluoroelastomer molded product containing no carbon black, and having a shore A hardness of 25 or more and 60 or less, and a protective member comprising the perfluoroelastomer molded product.
Claims15
A perfluoroelastomer molded product containing no carbon black, and having a shore A hardness of 25 or more and 60 or less.
Dependencies are inferred from the claim text.