Apparatus and method for producing porous glass preform
AssigneeShin-Etsu Chemical Co., Ltd.
InventorNaoto NODA
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Abstract
A method and an apparatus for producing a porous glass preform by using organosiloxane raw material is provided. The apparatus for producing the porous glass preform 12 according to the present embodiment is configured to mix organosiloxane in a liquid state being a raw material with a carrier gas in a vaporizer 6, heat this mixture to be vaporized, supply this vapor to a burner 13 as a gas raw material, and produce a porous glass preform by depositing a glass fine particle produced by combusting the gas raw material on a starting material, herein the apparatus for producing a porous glass preform includes a moisture removing apparatus 8 configured to remove moisture in the carrier gas and supply the vaporizer with the carrier gas.
Claims20
A method for producing a glass preform, comprising:
- mixing organosiloxane in a liquid state being a raw material with a carrier gas in a vaporizer;
- heating this mixture to be vaporized;
- supplying this vapor to a burner as a gas raw material;
- depositing a glass fine particle produced by combusting the gas raw material on a starting material and thereby producing a porous glass preform;
- and
- sintering the porous glass preform, wherein
- a moisture concentration in the carrier gas to be introduced into the vaporizer is reduced to 3 volppm or less.
An apparatus for producing a porous glass preform, configured to:
- mix organosiloxane in a liquid state being a raw material with a carrier gas in a vaporizer;
- heat this mixture to be vaporized;
- supply this vapor to a burner as a gas raw material;
- and
- deposit a glass fine particle produced by combusting the gas raw material on a starting material and thereby produce a porous glass preform, wherein
- the apparatus for producing a porous glass preform comprises an apparatus configured to remove moisture in the carrier gas, and supply the vaporizer with the carrier gas.
Dependencies are inferred from the claim text.