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US 2022/0181183 A1Published application
Gas plug, electrostatic attraction member, and plasma treatment device
AssigneeKYOCERA Corporation
InventorsYuuji KAWASE, Yukio NOGUCHI
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Abstract
A gas plug of the present disclosure is composed of a columnar porous composite in which a plurality of silicon compound phases containing silicon carbide as a main component are connected to each other via a silicon phase having silicon as a main component. The porous composite is housed inside a tubular body made from a dense ceramic.
Claims11
A gas plug comprising a porous composite having a columnar shape, the porous composite comprising a plurality of silicon compound phases which are connected to each other via a silicon phase comprising silicon as a main component.
Dependencies are inferred from the claim text.