Control program, container and semiconductor device manufacturing system for charging of wafer type sensor and auto teaching
AssigneeSemes Co., Ltd.
InventorsYong Seok Jang, In Kyu Park
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Abstract
The present disclosure provides a control device for charging and auto teaching of a wafer type sensor, a control program executed by the control device, a wafer type sensor storage device, a wafer type sensor charging device, and a semiconductor device manufacturing facility. The control program is a program executed by a control device equipped with a processor, and monitors a semiconductor device manufacturing facility and its part using a wafer type sensor, and monitors the remaining battery level of the wafer type sensor.
Claims20
A control program executed by a control device equipped with a processor comprising:
- an instruction for monitoring a semiconductor device manufacturing facility and its part by using a wafer type sensor;
- and
- an instruction for monitoring a remaining battery level of the wafer type sensor.
A container equipped with a wafer type sensor,
- wherein the container charges the wafer type sensor using a load port module having a battery charging device.
A semiconductor device manufacturing facility comprising:
- a load port module installed as a front end module (FEM);
- an index module installed adjacent to the load port module and including a first transfer robot for transferring a substrate mounted in a container on the load port module;
- a plurality of process chambers for processing the substrate;
- and
- a transfer chamber installed adjacent to the process chamber and having a second transfer robot for carrying in an unprocessed substrate transferred by the first transfer robot into the process chamber, or carrying out a pre-processed substrate from the process chamber,
- wherein the load port module includes a battery charging device, and
- wherein a wafer type sensor mounted in the container is charged using the battery charging device.
Dependencies are inferred from the claim text.