Testing equipment, its component carrying device and testing method of the testing equipment

A component carrying device, comprising:

• a carrying arm;
• a vacuum suction unit connected to the carrying arm for removably sucking to a device under test (DUT);
• a working bottom cover comprising a cover body and an elastic airtight ring, one end of the cover body being connected to the carrying arm, and the other end of the cover body being formed with a recessed groove, and the elastic airtight ring being fixedly disposed on the other end of the cover body and surrounding the recessed groove;
• and
• a fluid transmission assembly comprising a plurality of delivery pipelines respectively extending into the liquid filling space, and used to connect to a liquid temperature control device,
• wherein when the elastic airtight ring hermetically covers a top surface of the DUT, a liquid filling space being in communication with the delivery pipelines is collectively defined between the recessed groove and the top surface of the DUT.

A testing method of a testing equipment, comprising:

• (a) sucking to a top surface of a device under test (DUT) through a component carrying device in a vacuum fashion;
• (b) hermetically covering the top surface of the DUT with the component carrying device so that a liquid filling space is collectively defined between the component carrying device and the top surface of the DUT;
• (c) lifting and carrying the DUT onto a testing platform;
• (d) injecting a working liquid into the liquid filling space so as to be thermally exchanged with the DUT, and then withdrawing the working liquid away from the liquid filling space;
• (e) electrically testing the DUT, and determining whether a temperature of the DUT is matched within a preset standard;
• (f) returning back to Step (d) when it is determined that the temperature of the DUT is not matched within the preset standard;
• (g) drying the DUT in the liquid filling space after the DUT being electrically tested is finished;
• and
• (h) moving the DUT to a collection zone from the testing platform.