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US 2022/0178966 A1Published application
Chevron interconnect for very fine pitch probing
AssigneeIntel Corporation
InventorPooya Tadayon
Life of this patent
Estimating the term…
Abstract
An apparatus an apparatus comprising: a substrate having a plane; and an array of at least one conductive probe having a base affixed to the substrate, the at least one conductive probe having a major axis extending from the plane of the substrate and terminating at a tip, wherein the one or more conductive probes comprise at least three points that are non-collinear.
Claims20
An apparatus comprising:
- a substrate comprising conductive features;
- and
- a plurality of conductive probes projecting from a plane of the substrate, wherein:
- a base of individual ones of the probes is coupled with corresponding ones of the conductive features;
- individual ones of the probes comprise a first straight segment extending a first distance from the base to a first end in a first direction over the plane of the substrate and at a first zenith angle oblique to the plane of the substrate;
- and
- the individual ones of the probes comprise a second straight segment comprising a second end in direct contact with the first end, the second straight segment extending from the second end a second distance in a second direction over the plane of the substrate that is rotated azimuthally from the first direction, and at a second zenith angle oblique to the plane of the substrate.
4 more elements
A system comprising:
- a probe station;
- and
- a probe card electrically coupled to the probe station wherein, the probe card comprises a plurality of conductive probes projecting from a plane of a probe card substrate, and wherein individual ones of the probes comprise:
- a first straight segment extending a first distance from the base to a first end in a first direction over the plane of the substrate and at a first zenith angle oblique to the plane of the substrate;
- and
- a second straight segment comprising a second end in direct contact with the first end, the second straight segment extending from the second end a second distance in a second direction over the plane of the substrate that is rotated azimuthally from the first direction, and at a second zenith angle oblique to the plane of the substrate.
3 more elements
A method of electrically testing an integrated circuit (IC) device, the method comprising:
- receiving a device under test (DUT);
- contacting test points on the DUT with a plurality of probes;
- and
- performing an electrical test of the DUT with a probe station coupled to the probes, wherein the probe card comprises a plurality of conductive probes projecting from a plane of a probe card substrate, and wherein individual ones of the probes comprise:
- a first straight segment extending a first distance from a base to a first end in a first direction over the plane of the substrate and at a first zenith angle oblique to the plane of the substrate;
- and
- a second straight segment comprising a second end in direct contact with the first end, the second straight segment extending from the second end a second distance in a second direction over the plane of the substrate that is rotated azimuthally from the first direction, and at a second zenith angle oblique to the plane of the substrate.
4 more elements
Dependencies are inferred from the claim text.