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US 2022/0178963 A1Published application
Mems vibrating beam accelerometer with built-in test actuators
AssigneeHoneywell International Inc.
InventorJohn Reinke
Life of this patent
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Abstract
An example system comprising: a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising: a proof mass; and a first resonator mechanically coupled to the proof mass; a first electrode configured to apply a force to the proof mass.
Claims20
A system comprising:
- a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising:
- a proof mass;
- and
- a first resonator mechanically coupled to the proof mass;
- a first electrode configured to apply a force to the proof mass.
2 more elements
A method of testing of a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA), the method comprising:
- applying a force to a proof mass of a MEMS VBA via a first electrode;
- and
- detecting, by either of a second electrode and a first resonator, a motion of the proof mass due to the applied force, wherein the first resonator is mechanically coupled to the proof mass.
A system comprising:
- a microelectromechanical system (MEMS) vibrating beam accelerometer (VBA) comprising:
- a proof mass;
- a first resonator mechanically coupled to the proof mass;
- a second resonator mechanically coupled to the proof mass, wherein the first resonator and the second resonator are arranged with opposing scale factors;
- a first electrode configured to apply a force to the proof mass;
- a second electrode configured to sense a motion of the proof mass and output a signal corresponding to the sensed motion of the proof mass;
- and
- processing circuitry configured to:
- cause the first electrode to apply the force to the proof mass;
- receive a signal corresponding to the motion of the proof mass in response to the applied force sensed by the second electrode;
- and
- determine the motion of the proof mass based on the received signal.
9 more elements
Dependencies are inferred from the claim text.