US 2022/0178871 A1Published application

Gas determination device, gas determination method, and gas determination system

AssigneeTaiyo Yuden Co., Ltd.

InventorsManoharan MURUGANATHAN, Gabriel AGBONLAHOR, Hiroshi MIZUTA, Kenichi SHIMOMAI, Masashi HATTORI, Yosuke ONDA

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Abstract

A gas determination method uses a sensor having a field-effect transistor structure including a gate electrode, an insulating film formed on the gate electrode, a source electrode and a drain electrode formed on the insulating film, and a graphene layer formed on the insulating film and connecting the source electrode and the drain electrode to each other. The gas determination method includes: supplying gas to the graphene layer; applying a first voltage to the gate electrode for a predetermined period of time; and thereafter measuring a change in a current flowing between the source electrode and the drain electrode when a sweep voltage is applied to the gate electrode, repeating the same current measurement with a second voltage different from the first voltage, and determining the gas based on the measurement results.

Claims14

Dependent claims

A gas determination device, comprising:

a sensor including
a first electrode,
an insulating film formed on the first electrode,
a second electrode and a third electrode formed on the insulating film, and
a graphene layer for absorbing a gas, formed on the insulating film and electrically connecting the second electrode and the third electrode to each other;
and
an information processing device that
acquires a change in a first current that is a current between the second electrode and the third electrode when a sweep voltage is applied to the first electrode after a first voltage has been applied to the first electrode, the sweep voltage changing in a predetermined range, and
acquires a change in a second current that is a current between the second electrode and the third electrode when the sweep voltage is applied to the first electrode after a second voltage different from the first voltage has been applied to the first electrode;
and
determines a type or concentration of the gas adsorbed to the graphene layer on a basis of a measurement result of the change in the first current with respect to the sweep voltage and a measurement result of the change in the second current with respect to the sweep voltage.

8 more elements

A gas determination method, using a sensor including a first electrode, an insulating film formed on the first electrode, a second electrode and a third electrode formed on the insulating film, and a graphene layer for absorbing a gas, formed on the insulating film and electrically connecting the second electrode and the third electrode to each other, the gas determination method comprising:

supplying the gas to the graphene layer;
applying a first voltage to the first electrode for a predetermined period of time;
thereafter, measuring a change in a first current that is a current between the second electrode and the third electrode when a sweep voltage is applied to the first electrode after the first voltage has been applied to the first electrode, the sweep voltage changing in a predetermined range;
thereafter, applying a second voltage different from the first voltage to the first electrode for a predetermined period of time;
thereafter, measuring a change in a second current that is a current between the second electrode and the third electrode when the sweep voltage is applied to the first electrode after the second voltage has been applied to the first electrode;
and
determining a type or concentration of the gas on a basis of a measurement result of the change in the first current with respect to the sweep voltage and a measurement result of the change in the second current with respect to the sweep voltage.

4 more elements

Dependencies are inferred from the claim text.