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US 2022/0178863 A1Published application
Sensor
AssigneeMINEBEA MITSUMI Inc.
InventorsFumihiro INOUE, Taketomo NAKANE
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Abstract
A sensor includes a substrate, a reference electrode provided above the substrate, a lower electrode provided above the reference electrode via an insulating film, and an upper electrode provided above the lower electrode via a physical quantity detecting film. The upper electrode and the lower electrode form a parallel-plate-type detection capacitor, and the lower electrode and the reference electrode form a parallel-plate-type reference capacitor.
Claims13
A sensor comprising:
- a first semiconductor chip;
- and
- a second semiconductor chip, wherein
- the first semiconductor chip includes:
- a substrate;
- a reference electrode provided above the substrate;
- a lower electrode provided above the reference electrode via an insulating film;
- and
- an upper electrode provided above the lower electrode via a physical quantity detecting film, and
- the second semiconductor chip includes:
- a driver configured to apply a first alternate current drive signal to the upper electrode and apply a second alternate current drive signal to the reference electrode, the first alternate current drive signal and the second alternate current drive signal being in opposite phases;
- and
- a charge-to-voltage converter configured to convert an electric charge into a voltage, the electric charge being output from the lower electrode.
10 more elements
Dependencies are inferred from the claim text.