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US 2022/0178862 A1Published application
Fast humidity sensor and a method for calibrating the fast humidity sensor
AssigneeVaisala Oyj
InventorsJukka Leppänen, Marko Jalonen
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Abstract
According to an example aspect of the present invention, there is provided a sensor structure formed on a substrate comprising a sensor frame, comprising electric contacts for sensors, an active sensor within the sensor frame comprising at least a capacitive humidity sensor. In accordance with the invention the active sensor is connected to the sensor frame only by a thin thermally isolating layer supporting the active sensor, the thermally isolating layer including electric contacts from the sensor frame.
Claims20
A sensor structure formed on a substrate comprising:
- a sensor frame, comprising electric contacts for sensors, and
- an active sensor within the sensor frame comprising at least a capacitive humidity sensor,
- wherein
- the active sensor is connected to the sensor frame only by a thermally isolating layer supporting the active sensor, the thermally isolating layer including electric contacts from the sensor frame,
- the substrate is removed from the active sensor area,
- the active sensor includes at least one of a heating resistor and a temperature measurement resistor, wherein the temperature of the capacitive humidity sensor is measured by the temperature measurement resistor, and wherein the capacitive humidity sensor is heated by a separate heater resistor or by periodically powering or measuring temperature measurement resistor, and
- where a difference between a thermal response time and a humidity response time of the active sensor is utilized for drift compensation.
4 more elements
Dependencies are inferred from the claim text.