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US 2022/0178837 A1Published application
Inspection apparatus and inspection method
AssigneeHamamatsu Photonics K.K.
InventorTomonori NAKAMURA
Life of this patent
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Abstract
An inspection apparatus is an inspection apparatus for inspecting a sample on which a plurality of light-emitting elements is formed, and includes an excitation light source that generates excitation light to irradiate the sample, a camera that images fluorescence having a wavelength longer than a reference wavelength in fluorescence from the light-emitting elements, and a control apparatus that determines a quality of each of the light-emitting elements based on fluorescence imaged by the camera, in which the reference wavelength is a wavelength obtained by adding a full width at half maximum of a normal fluorescence spectrum of the light-emitting element to a peak wavelength of the normal fluorescence spectrum.
Claims18
1:
- An inspection apparatus for inspecting an object on which a plurality of light-emitting elements is formed, the inspection apparatus comprising:
- an excitation light source configured to generate excitation light to irradiate the object;
- a first imager configured to image fluorescence having a wavelength longer than a first wavelength in fluorescence from the light-emitting elements;
- and
- a determining unit configured to determine quality of each of the light-emitting elements based on a first fluorescence image acquired by the first imager,
- wherein the first wavelength is a wavelength obtained by adding a full width at half maximum of a normal fluorescence spectrum of the light-emitting element to a peak wavelength of the normal fluorescence spectrum.
3 more elements
2:
- The inspection apparatus according to claim 1, further comprising:
- an optical element configured to separate fluorescence from the light-emitting elements into fluorescence having a wavelength longer than the first wavelength and fluorescence having a wavelength shorter than a second wavelength;
- and
- a second imager configured to image fluorescence having a wavelength shorter than the second wavelength, the fluorescence having a wavelength comprised in a normal fluorescence spectrum of the light-emitting element.
1 more element
3:
- The inspection apparatus according to claim 2,
- wherein the first wavelength and the second wavelength are the same wavelength, and
- the optical element is a dichroic mirror.
4:
- The inspection apparatus according to claim 2, wherein the determining unit determines a quality of each of the light-emitting elements based on the first fluorescence image and a second fluorescence image acquired by the second imager.
5:
- The inspection apparatus according to claim 4, wherein the determining unit determines a quality of each of the light-emitting elements based on the second fluorescence image, and determines a quality based on the first fluorescence image for a light-emitting element determined to be non-defective in the determination after the determination.
6:
- The inspection apparatus according to claim 4, wherein the determining unit determines a quality of each of the light-emitting elements based on the second fluorescence image, and determines a quality based on the first fluorescence image for a light-emitting element determined to be defective in the determination after the determination.
7:
- The inspection apparatus according to claim 4, wherein the determining unit determines a quality of each of the light-emitting elements based on a luminance of the second fluorescence image, and determines a quality of each of the light-emitting elements based on a bright spot contained in the first fluorescence image.
8:
- The inspection apparatus according to claim 1, wherein the determining unit outputs a quality determination result of each of the light-emitting elements.
9:
- The inspection apparatus according to claim 1, wherein the determining unit identifies a defective portion in the light-emitting elements, and outputs a position of the defective portion.
10:
- An inspection method of inspecting an object on which a plurality of light-emitting elements is formed, the method comprising:
- irradiating the object with excitation light;
- imaging fluorescence having a wavelength longer than a first wavelength in fluorescence from the light-emitting elements;
- and
- determining a quality of each of the light-emitting elements based on a first fluorescence image acquired in the imaging,
- wherein the first wavelength is a wavelength obtained by adding a full width at half maximum of a normal fluorescence spectrum of the light-emitting element to a peak wavelength of the normal fluorescence spectrum.
3 more elements
11:
- The inspection method according to claim 10, further comprising:
- separating fluorescence from the light-emitting elements into fluorescence having a wavelength longer than the first wavelength and fluorescence having a wavelength shorter than a second wavelength;
- and
- imaging fluorescence having a wavelength shorter than the second wavelength, the fluorescence having a wavelength comprised in a normal fluorescence spectrum of the light-emitting element.
1 more element
12:
- The inspection method according to claim 11, wherein the first wavelength and the second wavelength are the same wavelength.
13:
- The inspection method according to claim 11, a quality of each of the light-emitting elements is determined based on the first fluorescence image and a second fluorescence image acquired in the imaging fluorescence having the wavelength shorter than the second wavelength.
14:
- The inspection method according to claim 13 a quality of each of the light-emitting elements is determined based on the second fluorescence image, and a quality is determined based on the first fluorescence image for a light-emitting element determined to be non-defective in the determination after the determination.
15:
- The inspection method according to claim 13, a quality of each of the light-emitting elements is determined based on the second fluorescence image, and a quality is determined based on the first fluorescence image for a light-emitting element determined to be defective in the determination after the determination.
16:
- The inspection method according to claim 13, wherein a quality of each of the light-emitting elements is determined based on a luminance of the second fluorescence image, and a quality of each of the light-emitting elements is determined based on a bright spot contained in the first fluorescence image.
17:
- The inspection method according to claim 10, wherein a quality determination result of each of the light-emitting elements is output.
18:
- The inspection method according to claim 10, wherein a defective portion in the light-emitting elements is identified, and a position of the defective portion is output.